This PhD position on miniaturized optical measurement systems for lithography and metrology is part of a larger multi-disciplinary project named 'Advanced piezo-electric wafer stage for next generation lithography and metrology applications'. In this project, which is in collaboration with ASML N.V., in total four PhD students are aiming to demonstrate the feasibility of an advanced moving stage for holding silicon wafers in which light-weight and compact piezo-electric actuators are used. To enable the use of such actuators, new highly miniaturized and highly accurate optical position and strain sensors are required. The PhD candidate will investigate and design such new laser based photonic sensors using photonic integration technology and will realize and demonstrate the highly accurate sensors. The PhD candidate will be based in the Photonic Integration group (
phi.ele.tue.nl) but will collaborate intensely with the other PhD candidates in the project at the High Tech Systems Center.
The group Photonic Integration of the Electrical Engineering department of Eindhoven University of Technology is an internationally oriented group which is leading in researching, developing and utilizing photonic integration with III-V semiconductors to realize cutting edge devices. With our NanoLabNL facilities and our partnerships with companies like Smart Photonics, we are not only able to design these chips, but also to actually produce, characterize and analyze their performance.
We are looking for candidates who are interested in the application of integrated photonics for sensors and metrology, frequency stabilized semiconductor lasers and optics.
Successful candidates should have good writing and documentation skills, good analytical and research capabilities and excellent communication skills. They must be able to organize their own work well and set and pursue their goals independently. The candidate will collaborate not only with the other members of the Photonic Integration group, but in particular also with three other PhD students in the Electrical Engineering and Mechanical Engineering department as well as researchers at ASML.