Two post-master PDEng positions on electromagnetic modeling for wafer metrology
Two post-master PDEng positions on electromagnetic modeling for wafer metrology
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Job description
Eindhoven University of Technology (TU/e) has vacancies for
Two post-master PDEng positions on electromagnetic modeling for wafer metrology
in the Electromagnetics Group, department of Electrical Engineering.
The DEES-ICT post-master designers program is a two-year salaried program in the field of technological design in Electrical Engineering. The program leads to a Professional Doctorate in Engineering (PDEng) degree. For more information, visit the webpage of the PDEng program Design of Electrical Engineering Systems (DEES):
https://www.tue.nl/en/education/tue-graduate-school/pdeng-programs/pdeng-programs-overview/pdeng-dees-information-and-communication-technology/
Context of the PDEng projects
In the upcoming years, integrated circuits with an extremely high information-packing capacity, like NAND flash, will exhibit an increasing trend towards 3D stacking with ever increasing complexity in the build-up of the stack. An example of such 3D structures is a so-called V-NAND, see references [1,2]. In the manufacturing of these structures, it is important to monitor some of the fine details by means of metrology tools that are being developed at ASML. These metrology tools are formed by a measurement system on the one hand and computational modeling software on the other. One of the main challenges in the field of computational modeling for metrology is the construction of a Maxwell solver that can handle complicated 3D stacks. It should be able to accurately solve for the pertaining electromagnetic fields in a very short time-span. Next to high-complexity 3D stacks, another challenge for fast Maxwell solvers is formed by stacks containing combinations of metals and dielectrics [3].
New developments in integration and manufacturing technologies also have their impact on the level of complexity that needs to be handled by a Maxwell solver for metrology. This leads to new modeling challenges and opens up new perspectives in modeling approaches that are optimal with respect to new types of structures and materials. It is the aim of the two PDEng projects to address some of the challenges brought by highly integrated 3D structures.
[1] J. Jang et al., 'Vertical Cell Array using TCAT (Terabit Cell Array Transistor) Technology for Ultra High Density NAND Flash Memory', Dig. Symp. VLSI Tech., pp. 192-193, June 2009
[2] https://www.chipworks.com/about-chipworks/overview/blog/second-shoe-drops-%E2%80%93-samsung-v-nand-flash
[3] Besbes, M. et al., 'Numerical analysis of a slit-groove diffraction problem', Journal of the European Optical Society, Rapid Publications 2, 07022, 2007.
ASML (www.asml.com) is the world's leading provider of lithography systems for the semiconductor industry, manufacturing complex machines that are critical to the production of integrated circuits or microchips. Headquartered in Veldhoven, the Netherlands, ASML designs, develops, integrates, markets and services these advanced systems, which continue to help its customers - the major chipmakers - to reduce the size and increase the functionality of microchips, and consumer electronic equipment.
Department of Electrical Engineering
The Department of Electrical Engineering is one of the nine departments of the Eindhoven University of Technology and provides BSc and MSc programs in Electrical Engineering. The department has nine research groups and has research collaborations with other departments at the Eindhoven University of Technology as well as with a large number of other universities and companies, both within the Netherlands and internationally. The department has approximately 350 employees and 900 students.
Electromagnetics Group at TU/e investigates the behavior of electromagnetic fields by computational, analytical and experimental techniques. The knowledge thus obtained is used in a wide range of applications from all areas of Electrical Engineering, with particular attention for antennas and propagation, wireless communication, EM effects, nondestructive testing and bio-electromagnetics.
Two post-master PDEng positions on electromagnetic modeling for wafer metrology
in the Electromagnetics Group, department of Electrical Engineering.
The DEES-ICT post-master designers program is a two-year salaried program in the field of technological design in Electrical Engineering. The program leads to a Professional Doctorate in Engineering (PDEng) degree. For more information, visit the webpage of the PDEng program Design of Electrical Engineering Systems (DEES):
https://www.tue.nl/en/education/tue-graduate-school/pdeng-programs/pdeng-programs-overview/pdeng-dees-information-and-communication-technology/
Context of the PDEng projects
In the upcoming years, integrated circuits with an extremely high information-packing capacity, like NAND flash, will exhibit an increasing trend towards 3D stacking with ever increasing complexity in the build-up of the stack. An example of such 3D structures is a so-called V-NAND, see references [1,2]. In the manufacturing of these structures, it is important to monitor some of the fine details by means of metrology tools that are being developed at ASML. These metrology tools are formed by a measurement system on the one hand and computational modeling software on the other. One of the main challenges in the field of computational modeling for metrology is the construction of a Maxwell solver that can handle complicated 3D stacks. It should be able to accurately solve for the pertaining electromagnetic fields in a very short time-span. Next to high-complexity 3D stacks, another challenge for fast Maxwell solvers is formed by stacks containing combinations of metals and dielectrics [3].
New developments in integration and manufacturing technologies also have their impact on the level of complexity that needs to be handled by a Maxwell solver for metrology. This leads to new modeling challenges and opens up new perspectives in modeling approaches that are optimal with respect to new types of structures and materials. It is the aim of the two PDEng projects to address some of the challenges brought by highly integrated 3D structures.
[1] J. Jang et al., 'Vertical Cell Array using TCAT (Terabit Cell Array Transistor) Technology for Ultra High Density NAND Flash Memory', Dig. Symp. VLSI Tech., pp. 192-193, June 2009
[2] https://www.chipworks.com/about-chipworks/overview/blog/second-shoe-drops-%E2%80%93-samsung-v-nand-flash
[3] Besbes, M. et al., 'Numerical analysis of a slit-groove diffraction problem', Journal of the European Optical Society, Rapid Publications 2, 07022, 2007.
ASML (www.asml.com) is the world's leading provider of lithography systems for the semiconductor industry, manufacturing complex machines that are critical to the production of integrated circuits or microchips. Headquartered in Veldhoven, the Netherlands, ASML designs, develops, integrates, markets and services these advanced systems, which continue to help its customers - the major chipmakers - to reduce the size and increase the functionality of microchips, and consumer electronic equipment.
Department of Electrical Engineering
The Department of Electrical Engineering is one of the nine departments of the Eindhoven University of Technology and provides BSc and MSc programs in Electrical Engineering. The department has nine research groups and has research collaborations with other departments at the Eindhoven University of Technology as well as with a large number of other universities and companies, both within the Netherlands and internationally. The department has approximately 350 employees and 900 students.
Electromagnetics Group at TU/e investigates the behavior of electromagnetic fields by computational, analytical and experimental techniques. The knowledge thus obtained is used in a wide range of applications from all areas of Electrical Engineering, with particular attention for antennas and propagation, wireless communication, EM effects, nondestructive testing and bio-electromagnetics.
Specifications
- max. 38 hours per week
- Eindhoven View on Google Maps
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Eindhoven University of Technology (TU/e)
Requirements
Candidates for the PDEng positions should have a Master's degree in Electrical Engineering, (Applied) Physics, Applied Mathematics, or a related field, with excellent grades, an interest in combining theory, computational algorithms and numerical experimentation, and well-developed analytic skills. A background in computational electromagnetics is recommended.
Conditions of employment
We offer a fulltime temporary appointment for the period of 2 years. Participants will receive a gross monthly salary of € 1828. Moreover 8% bonus share (holiday supplement) and end year allowance is provided annually. Assistance for finding accommodation can be given. The university offers an attractive package of fringe benefits such as excellent technical infrastructure, child care, savings schemes, and excellent sports facilities.
Specifications
- Research, development, innovation
- Engineering
- max. 38 hours per week
- University graduate
- V36.3241
