ResearchThe goal of this project is to synthesize materials using atoms as building blocks in a bottom-up fashion. The fabrication of nanoelectronics currently relies almost completely on top-down processing, which is becoming more and more demanding now that the devices of the future predominantly consists of 3D nanostructures. While the ambition of using atomic building blocks connects to Feynman's vision formulated in his lecture '
There is plenty of room at the bottom', the realisation of bottom-up fabrication still remains a challenge, especially when considering approaches that can employed for high-volume manufacturing. To this end, the thin film deposition technique of atomic layer deposition (ALD) will be used as a starting point, which allows for the processing of materials with atomic-level control.
In this project, recently funded with an ERC Starting Grant, new approaches for
selective deposition will be developed, i.e. approaches that enable the deposition of material only there where it is needed, as an alternative to top-down fabrication involving photolithography and etching. The focus will be on two different flavours of selective deposition: (
i) topographically-selective deposition by distinguishing between horizontally- and vertically-oriented surfaces,
(
ii) area-selective deposition in 3D nanostructures by distinguishing between surfaces of different materials. The experiments will involve the exposure of surfaces to plasmas and the functionalization of surfaces with inhibitor molecules. See for more information the blog of our group, e.g.
https://www.atomiclimits.com/2018/12/21/towards-area-selective-atomic-layer-deposition-with-high-selectivity-our-perspective-on-area-selective-ald/ and
https://www.atomiclimits.com/2019/02/04/topographically-selective-processing-taking-selectivity-up-a-notch-by-processing-in-the-3rd-dimension/#commentsProject & Job descriptionWe are looking for a PhD student who is interested in performing fundamental experimental studies towards the development of these selective deposition approaches. A variety of experimental techniques will be employed to obtain insights into the growth and the surface chemistry such as in-situ ellipsometry and Fourier transform infrared spectroscopy. In order to demonstrate selective processes, depositions will be performed on 3D nanostructures samples, and analyzed by scanning and transmission electron microscopy. These experimental studies will be complemented with theoretical studies together with other project members. This PhD is a
4-year position intended to start in spring 2021.
LocationThe work will be performed in the group Plasma & Materials Processing at the Department of Applied Physics at the TU/e. The PMP group focuses on the advancement of the science and technology of plasma and materials processing, a research area which is in essence multidisciplinary and encompasses the research fields of plasma physics, surface science, and materials science. The scientific objective of the group is to obtain 'atomic' level understanding of the interaction of plasmas and gases with materials.