This project is to be carried out at
TU/e - Eindhoven University of Technology in collaboration with
ASML and
M2i-Materials Innovation Institute.
From their development in '70s the number of transistors on microprocessors doubles every
2 years - Moore's Law. Today, Moore's Law drives megatrends that shape our connected world: development of AI, smart devices, intelligent materials, etc. This is enabled by the development of new lithographic techniques that are pushing further microchips down-sizing, making semiconductors cheaper and electronic devices more powerful. The printing resolutions with the newest EUV technologies are as small as 8 nm, which is comparable to the atomic levels. To enable the rigorous functioning of the lithographic equipment's, hydrophobic coatings are applied in some parts of the machines, for example to protect surfaces from contact with water, oils or contaminants. These coatings are, however, exposed to very harsh environments inside the machines, and they must handle it for long and continous operation times.
The semiconductor industry largely relies on fluorine-based materials- Per- and Polyfluoroalkyl compounds, so-called PFAS, which are raising serious environmental and health concerns. Namely, they are omnipresent in lithographic equipment's due to their unique combination of properties - mechanically robust and very good water resistance. Many of the current hydrophobic coatings contain some sort of fluorinated compounds, and soon their use will be restricted due to upcoming PFAS-legislation. This project aims to explore strategies for durable PFAS-free hydrophobic coatings for use in conditions of ASML lithographic equipment.
The research will be conducted in close collaboration between a TU/e research group:
Coatings, Surfaces and Interfaces (CSI)/ Physical Chemistry (SPC) which is part of the Department of Chemical Engineering and Chemistry at
TU/e (The Netherlands),
ASML and
M2i-Materials Innovation Institute who will coordinate the project.
The TU/e offers academic education that is driven by fundamental and applied research. We combine scientific curiosity with a hands-on mentality. Our educational philosophy is based on personal attention and room for individual ambitions and talents. Our research meets the highest international standards of quality. We push the limits of science, which puts us at the forefront of rapidly emerging areas of research.