This project focuses on the design and implementation of advanced digital controllers for high precision power converters with ultra-high effective switching frequency. This involves research in nonlinear (switched and multi-rate) control structures, stabilizing, predictive and self-learning control theory, and real-time controller implementation. Validation has to be carried out using a prototype that is targeting a semiconductor lithography application. The research is part of the IT2 European project (IC Technology for the 2nm node) and it will be conducted within the Control Systems (CS) group of the Department of Electrical Engineering, TU/e, in close cooperation with the Electromechanics and Power Electronics (EPE) group, ASML and Prodrive.
To enable 2nm node technology and 200 wafer per hours productivity for preserving the leading role of EU in Integrated Circuit (IC) manufacturing, a new generation of ultra-high precision power amplifiers is needed to enable precise positioning of the wafer stage with sub-nanometer accuracy. The positioning accuracy depends, among others, on the bandwidth and current ripple of the power amplifier, which can be optimized by integrating more advanced amplifier hardware and digital control.
The objective of this PhD research is to exploit advanced control techniques (switching control, multi-rate control, self-learning control, nonlinear observers) and customized real-time implementation to significantly improve performance of ultra-high frequency power converters utilized in high-precision lithography machines. The research also involves laboratory work in terms of implementation and experimental verification of the research results on a prototype stage developed at TU/e in collaboration with industrial partners. The research output ultimately serves as a basis for future advancements in control of power converters and semiconductor technology.
Main research directions
- Modeling of switched-mode power converters: development of high-fidelity PLECS Simulink models for validation and switched/averaged models for digital controller/observer design.
- Advanced digital control methods: digital controllers for ultra-high frequency power converters must be simple enough to run in real-time. Nonlinear controllers with a simple structure based on switching among multiple basic controllers and multi-rate control structures will be researched. Techniques from stabilizing, predictive and self-learning control theory will be explored.
- Controller implementation on dedicated circuits: systematic methods for real-time implementation of nonlinear digital controllers and observers will be researched.
Control Systems groupThe CS group research activities span all facets of systems and control theory, such as linear, nonlinear and hybrid systems theory, model predictive control, distributed control, machine learning for control, modeling and identification, formal methods in control. The CS group has a strong interconnection with industry via national and European funded projects in a variety of application areas like high-precision mechatronics, power electronics, and sustainable energy (mobility, transport, smart grids). CS owns an Autonomous Motion laboratory and hosts several high-tech setups. The PhD student will join the group and interact with the other members of the CS group (around 40 researchers), where he/she will participate in a mix of academic and industrial research activities. Research within the CS Group is characterized by personal supervision. The PhD student will have access to the advanced courses offered by the Dutch Institute for Systems and Control and will attend the yearly Benelux Meeting on Systems and Control.