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The Advanced Research Center for Nanolithography (ARCNL) focuses on the fundamental physics involved in current and future key technologies in nano-lithography, primarily for the semiconductor industry. ARCNL is a public-private partnership between the Foundation for Fundamental Research on Matter (FOM), the University of Amsterdam (UvA), the VU University Amsterdam (VU) and the semiconductor equipment manufacturer ASML. ARCNL is located at the Science Park Amsterdam, The Netherlands, and has a size of approximately 100 scientists and support staff. See also www.arcnl.nl.
The goal of the research group Light-Matter Interaction (LMI) is to study the interaction of light with matter within the context of current, and potential future optical metrology applications, such as laser-induced ultrasonics. This requires a deeper understanding of the fundamental processes that play a role in the interaction of high power laser light with metals and other materials relevant in semiconductor device manufacturing, We study these processes on time scales ranging from femtoseconds to seconds.
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