In the Integrated Devices and Systems (IDS) group, we will start
two new research projects on the design, fabrication, and characterisation of MEMS devices.
The
first project will focus on a new type of gas flow sensor that is based on the deformation of integrated mechanical structures due to the forces exerted by the gas flow through the silicon chip. By combining such sensors with thermal flow sensors on a single chip, we expect that, besides mass flow, many relevant gas parameters can be measured like thermal conductivity, density, specific heat, and dynamic viscosity.
The
second project will focus on a new type of MEMS microphones, specifically aiming at acoustic monitoring applications that require ultra low power operation.
In both projects we will work closely together with experts in electronic circuit design to realize the electronic interfacing for the sensors, in case of the flow sensors with the Electronic Instrumentation Lab at the TU Delft, and in case of the microphones with the IC Design group at the University of Twente.
The main tasks are:
- The design and modelling of the new sensor topologies
- Development of the MEMS fabrication processes
- Fabrication of the sensor chips in the MESA+ cleanroom
- Evaluation of the resulting performance
- Development of the required interface electronics in cooperation with our partners.
- Various teaching activities in your field of expertise may take up to 20% of your time.
The candidates should have a background in electrical engineering, nanotechnology, applied physics, or mechanical engineering, with excellent theoretical and experimental skills, and preferably with experience in mechanical design, finite element modelling, and cleanroom fabrication of MEMS devices.