PhD position on chemical and physical processes during EUV exposure

PhD position on chemical and physical processes during EUV exposure

Published Deadline Location
20 Jan 31 Mar Enschede

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Job description

Are you interested in research on free-standing thin films of only few tens of nanometer thickness involving EUV experiments at a synchrotron?

Ultra-thin, transparent free-standing membranes are used as protective windows ('pellicles') in EUV photolithography, to protect EUV masks from contamination. The membranes need to resist not only thermo-mechanical stresses, but also surface degradation by EUV photon induced chemical reactions, bombardment by low energetic ions, and chemical etching by radicals. We are looking for a motivated and skilled researcher to investigate physical and chemical modifications of ultra-thin membranes. The aim of the project is to develop fundamental knowledge on the EUV-induced degradation mechanisms of thin films and find materials and processes to mitigate pellicle damage.

The project will be carried in the Industrial Focus Group XUV Optics where you will join a motivated team of researchers in the field of EUV optical devices. The group is at the forefront of fundamental research, relevant to high-tech, industrial focused applications ( The research will be carried out in a state-of-the-art thin film laboratory within the MESA+ Institute for Nanotechnology at the University of Twente, in collaboration with the PTB Laboratory in Berlin.

As a PhD researcher, your tasks will be to design and execute experiments in the context of EUV induced material damage mechanisms. You will make use of state-of-the art surface coating and analysis techniques (XPS, LEIS, XRD) at the University of Twente and occasionally synchrotron facilities at PTB for EUV degradation experiments. The insights will be used to build analytical models from fundamental principles. An understanding of theoretical concepts in addition to detailed understanding of metrology is therefore, beneficial. In this manner, your contributions will lead to possible new understanding in the field.


University of Twente (UT)


  • You have a master's degree in physics, materials science, light-matter interaction or a related field with relevant knowledge/experience.
  • You are fluent in English and able to collaborate with an international team of industrial and academic parties in regular meetings and work visits.
  • It's a plus to have lab experience with plasma, thin film deposition and/or thin film analysis setups.
Enthusiasm for coating nanoscale thin films (MEMS, CMOS or related) and studying their optical, structural and mechanical properties.

Conditions of employment

  • You will be appointed on a fulltime position for four years. The position is available immediately.
  • The university offers a dynamic ecosystem with enthusiastic colleagues in a stimulating scientific environment.
  • The PhD salary is € 2.541,- in the first year, increasing to € 3.247,- in the fourth year.
  • The offer further involves a holiday allowance of 8% of the gross annual salary and a year-end bonus of 8.3%, a solid pension scheme, a minimum of 29 holidays, and numerous professional and personal development programmes.


The University of Twente stands for life sciences and technology. High tech and human touch. Education and research that matter. New technology which leads change, innovation and progress in society. The University of Twente is the only campus university in the Netherlands. We have a strong focus on personal development and give scope for carrying out pioneering research. The Faculty of Science & Technology works together intensively with industrial partners and researchers in the Netherlands and abroad and conducts extensive research for external commissioning parties and funders.

The XUV Optics group is embedded in the MESA+ Institute (, which is one of the largest nanotechnology research institutes in the world, delivering competitive and successful high-quality research. The institute employs 500 people of which 275 are PhD's or PostDocs. With its unique NanoLab facilities the institute holds 1250 m2 of cleanroom space and state-of-the-art research equipment.

The University of Twente is an equal opportunity employer which values diversity. We do not discriminate on race, religion, color, national origin, gender, sexual orientation, age, marital status, or disability status. Because of our diversity values we do particularly support women to apply.


  • PhD
  • Natural sciences
  • max. 40 hours per week
  • €2541—€3247 per month
  • University graduate
  • 1029


University of Twente (UT)

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Drienerlolaan 5, 7522NB, Enschede

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