Photolithography machines play a central role in the production of ever smaller and faster microchips and represent high-precision systems of enormous complexity. Water conditioning is often required in sensitive modules of these machines to maintain strict thermal requirements. However, a negative consequence of this is that pressure disturbances in these water circuits can generate undesirable forces on the structure. These pressure disturbances may be flow induced, from circuit components and pumps, for example, but may also arise from vibrations of the structure leading to acoustic cross-talk between locations of differing dynamic sensitivity. The goal of this study is to develop quieter & more effective water-cooling circuits by understanding and damping the sources of flow-induced vibrations. The work will be both theoretical (numerical simulations) and experimental (dynamic pressure measurements on flow circuits). The work will be carried out both at TU/e and ASML premises.
A general outline of the project can be envisaged as follows:
- Review relevant concepts & literature
- Use and modify existing test setups and investigate performance results
- Model the dynamic behavior of turbulent separated flows and the associated acoustic disturbance source
- Select and study different sources of vibrations experimentally and numerically
- Compare results of models and theoretical/numerical outcome
- Suggest improved circuit components such as diffusers, junctions and manifolds.
- Insight into disturbance sources;
- Improved performance prediction;
- Design of quieter circuit components;
- Predict dynamic behavior of cooling circuits;
- Novel mitigation & control strategies.